Enhanced sensitivity of zinc phthalocyanine-based microporous humidity sensors by varying size of electrode gaps

• The sensitivity of zinc phthalocyanine based organic humidity sensor has been improved by integration microporous template. Effects electrode gaps on the device sensors are studied. shortest with presence template exhibits best sensitivityand low hysteresis. use materials become an increasingly important issue in sensing devices recent times. Phthalocyanine is among most promising this undertaking. Zinc (ZnPc) was fabricated and its capacitance utilized as mechanism for a sensor. effect gap electrical properties investigated along correlation between device’s performances morphology film. Using solution-processed spin coating method, capacitive type have planar geometry Al/ZnPc/Al size measured surface profiler 53.00 ± 0.06 ?m, 119.00 0.03 ?m 286.00 0.01 ?m. characterized using transmission electron microscopy (TEM), field emission scanning (FESEM) X-ray photoelectron spectroscopy (XPS). Analysis experimental results showed that (53.00 ?m) produced 1.03 0.04 pF/%RH than longer gaps. Additionally, hysteresis well response recovery also investigated.